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  1. We firstly demonstrated the detection of anions in air using a nano field-effect transistor (nanoFET) device. Negative ions in air charged the top surface of the silicon nanoFET channel affecting the fieldeffe...

    Authors: Yeong-Tai Seo, Kook-Nyung Lee, Kuk Jin Jang, Min-Ho Lee, HyungSu Lee, WooKyeong Seong and Yong-Kweon Kim

    Citation: Micro and Nano Systems Letters 2014 2:7

    Content type: Letter

    Published on:

  2. We report a fabrication technique for dense, detailed lithographic patterning on high-aspect-ratio vertical sidewalls, and illustrate its use through the fabrication of etched array of micro-dimples on the sid...

    Authors: Chang-Hyeon Ji, Florian Herrault and Mark G Allen

    Citation: Micro and Nano Systems Letters 2014 2:6

    Content type: Letter

    Published on:

  3. An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam stru...

    Authors: Min-Wu Kim, Yong-Ha Song, Seung-Deok Ko, Sang-Joon Ahn and Jun-Bo Yoon

    Citation: Micro and Nano Systems Letters 2014 2:2

    Content type: Letter

    Published on:

  4. We proposed a micro electrode fabrication method by a metal inkjet printing technology for the bio-applications of dielectrophoresis (DEP). The electrodes are composed of bottom planar gold (Au) electrodes and...

    Authors: Seung Hyun Lee, Gyu-Young Yun, Yul Koh, Sang-Ho Lee and Yong-Kweon Kim

    Citation: Micro and Nano Systems Letters 2013 1:5

    Content type: Letter

    Published on:

  5. Wafer level adhesive bonding has been applied for the fabrication of micro systems which have heterogeneous components on LSI. Films or MEMS devices formed on a carrier wafer are transferred on a LSI wafer, wh...

    Authors: Masayoshi Esashi and Shuji Tanaka

    Citation: Micro and Nano Systems Letters 2013 1:3

    Content type: Review

    Published on: