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We firstly demonstrated the detection of anions in air using a nano field-effect transistor (nanoFET) device. Negative ions in air charged the top surface of the silicon nanoFET channel affecting the fieldeffe...
Citation: Micro and Nano Systems Letters 2014 2:7
We report a fabrication technique for dense, detailed lithographic patterning on high-aspect-ratio vertical sidewalls, and illustrate its use through the fabrication of etched array of micro-dimples on the sid...
Citation: Micro and Nano Systems Letters 2014 2:6
The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-in...
Citation: Micro and Nano Systems Letters 2014 2:4
This paper introduces a pneumatic dispensing system to control the velocity of nanoliter droplets with small variation of volume. The system consists of a flexible membrane integrated with a backflow stopper. ...
Citation: Micro and Nano Systems Letters 2014 2:5
An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam stru...
Citation: Micro and Nano Systems Letters 2014 2:2
This paper presents an electrochemical sensing approach that enables quantitative detection of three major catecholamine hormones from a mixture by specifically employing a chemically-modified microelectrode a...
Citation: Micro and Nano Systems Letters 2014 2:1
A piezoelectrically actuated corner cube retroreflector (CCR) has been investigated for free space optical communications. The proposed CCR consisted of two mutually orthogonal bulk-micromachined mirror assemb...
Citation: Micro and Nano Systems Letters 2013 1:7
Biomimetics is the study and simulation of biological systems for desired functional properties. It involves the transformation of underlying principles discovered in nature into man-made technologies. In this...
Citation: Micro and Nano Systems Letters 2013 1:6
We proposed a micro electrode fabrication method by a metal inkjet printing technology for the bio-applications of dielectrophoresis (DEP). The electrodes are composed of bottom planar gold (Au) electrodes and...
Citation: Micro and Nano Systems Letters 2013 1:5
Zinc oxide (ZnO) nanowires were synthesised through two different methods; the vapour liquid solid (VLS) method and an aqueous solution method. Each method had its own set of parameters and changes in those pa...
Citation: Micro and Nano Systems Letters 2013 1:4
Wafer level adhesive bonding has been applied for the fabrication of micro systems which have heterogeneous components on LSI. Films or MEMS devices formed on a carrier wafer are transferred on a LSI wafer, wh...
Citation: Micro and Nano Systems Letters 2013 1:3
Existing models for thermoelastic damping consider geometric size effects only, the focus of this study is on tuning of thermoelastic damping with mechanical strain, which reduces both relaxation rate and ther...
Citation: Micro and Nano Systems Letters 2013 1:2
In this paper, a simple and robust model is presented to explain the main reason behind undercutting at convex corners and no-undercutting at concave corners. The etch rate of the tangent plane at convex corne...
Citation: Micro and Nano Systems Letters 2013 1:1
