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  1. We proposed a micro electrode fabrication method by a metal inkjet printing technology for the bio-applications of dielectrophoresis (DEP). The electrodes are composed of bottom planar gold (Au) electrodes and...

    Authors: Seung Hyun Lee, Gyu-Young Yun, Yul Koh, Sang-Ho Lee and Yong-Kweon Kim

    Citation: Micro and Nano Systems Letters 2013 1:5

    Content type: Letter

    Published on:

  2. Wafer level adhesive bonding has been applied for the fabrication of micro systems which have heterogeneous components on LSI. Films or MEMS devices formed on a carrier wafer are transferred on a LSI wafer, wh...

    Authors: Masayoshi Esashi and Shuji Tanaka

    Citation: Micro and Nano Systems Letters 2013 1:3

    Content type: Review

    Published on: