We present a photolithography scheme for ultra-tall, high-aspect-ratio microstructures. While increased height of microstructures can expand the design capability of various microdevices, it has been challengi...
Authors: Jungkwun J. K. Kim, Hassan Al Thuwaini and Mohammad Almuslem
In this paper, a stress and fracture study, occurring during the chemical mechanical polishing (CMP) of anodically bonded substrates is presented. The samples contain glass pillars, used to form the glass cavi...
Authors: Sung-min Sim, Yeonsu Lee, Hye-Lim Kang, Youngsuk Hwang, Chi-Hyun Park, Ignacio Llamas-Garro and Jung-Mu Kim
In this paper, we characterized the behavior of polymer jet from near-field electrospinning onto the inkjet patterned paper with conductive Ag nanoparticles in order to form the controlled three-dimensional na...
Authors: Jinseong Kim, Bohee Maeng and Jungyul Park
In this research, we present the feasibility testing results of a simple distance measurement system using microfabricated scanning micromirrors. Two different configurations have been tested with different ty...
Authors: Kyoungeun Kim, Jungyeon Hwang and Chang-Hyeon Ji
A volatile organic compound (VOC) sensor array based on metal oxide nanoparticles (MOX NPs) functionalized by metalloporphyrins (MPPs) was demonstrated. The VOC sensor array was composed of four single sensors...
Authors: Byeonghwa Cho, Kyounghoon Lee, Soonjae Pyo and Jongbaeg Kim
In the present study, a screen-printed electrode based-sensor with electrochemical detection was developed for rapid and sensitive determination of acetylcholine. At first, the screen-printed carbon electrode ...
Authors: Sayed Zia Mohammadi, Hadi Beitollahi and Somayeh Tajik
This paper reports the first demonstration of hydrogel conical tip attachment onto quartz tuning fork (QTF) by using an elastomeric tip mold that is soft-lithographically replicated from an electrochemically e...
Authors: Juhee Ko, Amun Jarzembski, Keunhan Park and Jungchul Lee
A catalytic combustible type single-chip micro gas sensor was fabricated by MEMS technology and responses with input powers and methane and hydrogen gas concentrations were characterized. The ranges of respons...
Authors: Woongjin Jang, Joon-Shik Park, Ki-Won Lee and Yonghan Roh
This study aims to propose a new fabrication method for an ohmic contact type RF-MEMS switch with Au–Au/carbon nanotube (CNT)-composite contacts. These contacts are proposed to improve the reliability and the ...
Authors: Tomoaki Kageyama, Koichi Shinozaki, Lan Zhang, Jian Lu, Hideki Takaki and Sang-Seok Lee
Thanks to the excellent barrier property and fabrication accessibility, Parylene has been actively used in the microelectromechanical system. An ultra-thin Parylene film with thickness smaller than 100 nm is u...
Authors: Yaoping Liu, Dongyang Kang, Wangzhi Dai, Haida Li, Wei Wang and Yu-Chong Tai
Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabrication of microelectromechanical systems components. In this technique of microfabrication, alignment of mask edg...
Authors: Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey and Prem Pal
Droplet microfluidics has emerged as a promising technique to perform high-throughput, massively-parallel chemical and molecular biological reactions. Droplet microfluidic operations such as droplet generation...
Contemporary biomedical research requires development of novel techniques for sorting and manipulation of cells within the framework of a microfluidic chip. The desired functions of a microfluidic chip are ach...
Authors: Arslan Atajanov, Alexander Zhbanov and Sung Yang
This study presents a finger-triggered portable polydimethylsiloxane suction cup that enables equipment-free microfluidic pumping. The key feature of this method is that its operation only involves a “pressing...
Authors: Sanghyun Lee, Hojin Kim, Wonhyung Lee and Joonwon Kim
Microprobes are used to repair neuronal injury by recording electrical signals from neuronal cells around the surface of the device. Following implantation into the brain, the immune response results in format...
Authors: Eunhee Kim, Jin-Young Kim and Hongsoo Choi
This paper presents results for dispensing living cells using a pneumatic dispensing system to verify the feasibility of using this system to fabricate biomaterials. Living cells (i.e., mouse 3T3-J2 fibroblast...
Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with ...
Authors: Jun-gu Kang, Joon-Shik Park, Kwang-Bum Park, Junho Shin, Eung-An Lee, Sangsoo Noh and Hoo-Jeong Lee
This paper proposes a device level solution to achieve linear frequency tuning with respect to a tuning voltage (Vtune) sweep in an inductor (L)–capaci...
Authors: Chang-Hoon Han, Yong-Hoon Yoon, Seung-Deok Ko, Min-Ho Seo and Jun-Bo Yoon
This letter reports two novel electrode design considerations to satisfy two very important aspects of EWOD operation—(1) Highly consistent volume of generated droplets and (2) Highly improved accuracy in the gen...
Authors: N. Y. Jagath B. Nikapitiya, Mun Mun Nahar and Hyejin Moon
Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining. The use of Si{110} in MEMS is inevitable when a microstructure with vertical sid...
Authors: A. V. Narasimha Rao, V. Swarnalatha and P. Pal
Cardiovascular disease is a very serious disease which results in about 30% of all global mortality. Atrial fibrillation (AF) causes rapid and irregular contractions resulting in stroke and cardiac arrest. AF ...
We present a facile method for the preparation of polyethyleneglycol diacrylate (PEG-DA) hydrogels with plasmonic gold (Au) nanospheres incorporated for various biological and chemical sensing applications. Pl...
Authors: Dinesh Veeran Ponnuvelu, Seokbeom Kim and Jungchul Lee
This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy...
Authors: Hyunok Cho, Jongcheol Park and Jae Yeong Park
Despite many efforts to create nanogratings to exploit exceptionally enhanced nano-sized effects, realizing sub-10 nm nanogratings on a large area still remains a great challenge. Herein, we demonstrate fabric...
Authors: Min-Seung Jo, Kwang-Wook Choi, Min-Ho Seo and Jun-Bo Yoon
We present a simple and scalable fluidic-assembly approach, in which bundles of single-walled carbon nanotubes (SWCNTs) are selectively aligned and deposited by directionally controlled dip-coating and solvent...
Biofilm formed on the surface of the object by the microorganism resulting in fouling organisms. This has led to many problems in daily life, medicine, health and industrial community. In this study, we tried ...
Extracellular vesicles (EVs) are small membrane-bound bodies that are released into extracellular space by diverse cells, and are found in body fluids like blood, urine and saliva. EVs contain RNA, DNA and pro...
Wireless power transmission was conceptualized nearly a century ago. Certain achievements made to date have made power harvesting a reality, capable of providing alternative sources of energy. This review prov...
Authors: Le-Giang Tran, Hyouk-Kyu Cha and Woo-Tae Park
A microbial fuel cell (MFC) is a bioinspired energy converter which directly converts biomass into electricity through the catalytic activity of a specific species of bacteria. The effect of temperature on a m...
Highly reactive integrated material systems have recently gained attention, as they promise a feasible tool for heterogeneous integration of micro electromechanical systems. As integrated energy sources they c...
Authors: Matthias P. Kremer, Ali Roshanghias and Andreas Tortschanoff
Ion concentration polarization (ICP) has been widely studied for collecting target analytes as it is a powerful preconcentrator method employed for charged molecules. Although the method is quite robust, simpl...
Authors: Kyungjae Lee, Yong Kyoung Yoo, Sung Il Han, Junwoo Lee, Dohwan Lee, Cheonjung Kim and Jeong Hoon Lee
High throughput nanomanufacturing of photopatternable nanofibers and subsequent photopatterning is reported. For the production of high density nanofibers, the tube nozzle electrospinning (TNE) process has bee...
Authors: Sheng-Po Fang, PitFee Jao, David E. Senior, Kyoung-Tae Kim and Yong-Kyu Yoon
We herein report on a simple and novel method of refractometry that uses a micro image defocusing technique. This simple method makes use of a three-pinhole aperture attached to a microscopic optical system. I...
Authors: Sang Youl Yoon, Ji-chul Hyun and Sung Yang
Recently, novel biomolecules separation and detection methods based on ion concentration polarization (ICP) phenomena have been extensively researched due to its high amplification ratio and high-speed accumul...
Authors: Seok Young Son, Hyomin Lee and Sung Jae Kim
We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as ...
Authors: Han-Il Jung, Dae-Sung Kwon and Jongbaeg Kim
In this paper, we presents a MEMS pressure sensor integrated with a readout circuit on a chip for an on-chip signal processing. The capacitive pressure sensor is formed on a CMOS chip by using a post-CMOS MEMS...
Controlling cells’ movement is an important technique in biological analysis that is performed within a microfluidic system. Many external forces are utilized for manipulation of cells, including their positio...
Authors: Yugyung Jung, Ji-chul Hyun, Jongchan Choi, Arslan Atajanov and Sung Yang
This paper presents a novel dual-axis accelerometer that consists of a liquid metal droplet in a cone-shaped channel and an electrode layer with four Nichrome electrodes. The sensor uses the advantages of the ...
Authors: Myoung Huh, Dong-Joon Won, Joong Gil Kim and Joonwon Kim
We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co m...
Authors: Kyongtae Kim, Hong-Beom Kwon, Hye-Rin Ahn and Yong-Jun Kim
Construction of three-dimensional (3D) microenvironment become an important issue in recent biological studies due to their biological relevance compared to conventional two-dimensional (2D) microenvironment. ...
Authors: Chang Hyun Cho, Seyong Kwon and Je-Kyun Park
MEMS laser scanning enables the miniaturization of endoscopic catheters for advanced endomicroscopy such as confocal microscopy, multiphoton microscopy, optical coherence tomography, and many other laser scann...
Authors: Kyungmin Hwang, Yeong-Hyeon Seo and Ki-Hun Jeong
In this study, the effects of open area ratio (OAR) variations by micro-patterns on Cu alloy electrodeposition were analyzed experimentally. To change the OAR of the samples, a strip-type micro-pattern was for...
Bacterial therapies have been paid significant attentions by their ability to penetrate deep into the solid tumor tissue and its propensity to naturally accumulate in tumors of living animals. Understanding th...
Authors: Eunpyo Choi, Bohee Maeng, Jae-hun Lee, Hyung-kwan Chang and Jungyul Park
In this paper, nano-silver ink-jet printed transmission lines were fabricated to investigate RF performance on both flame retardant (FR-4) and polyimide (PI) as rigid and flexible substrates. The transmission ...
Authors: Sung-min Sim, Yeonsu Lee, Hye-lim Kang, Kwon-Yong Shin, Sang-Ho Lee and Jung-Mu Kim
This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual...
In wet bulk micromachining, the etching characteristics are orientation dependent. As a result, prolonged etching of mask openings of any geometric shape on both Si{100} and Si{110} wafers results in a structu...
Authors: Sajal Sagar Singh, Prem Pal, Ashok Kumar Pandey, Yan Xing and Kazuo Sato
This paper introduces a pneumatically driven inkjet printing system that forms highly viscous microdroplets in the nanoliter volume range. The printing system has a unique printing mechanism that uses a flexib...
A point electron source is desired to improve performance of high brightness electron beam instruments. It is valuable to create nano-sized tungsten (W) tip from sharp ordinary polycrystalline W needle. The sh...
Authors: Shigeki Hayashi, Masashi Ono, Shinya Tomonaga and Haruka Nakanishi
Originally introduced by H. A. Pohl in 1951, dielectrophoretic (DEP) force has been used as a striking tool for biological particle manipulation (or separation) for the last few decades. In particular, dielect...
Authors: Dongkyu Lee, Bohyun Hwang and Byungkyu Kim
