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Micro and Nano Systems Letters
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  1. Deep reactive-ion etching (DRIE) is commonly used for high aspect ratio silicon micromachining. However, scalloping, which is the result of the alternating Bosch process of DRIE, can cause many problems in the...

    Authors: Jin Soo Park, Dong-Hyun Kang, Seung Min Kwak, Tae Song Kim, Jung Ho Park, Tae Geun Kim, Seung-Hyub Baek and Byung Chul Lee

    Citation: Micro and Nano Systems Letters 2020 8:14

    Content type: Letter

    Published on:

  2. To pierce through the skin and interact with the first biofluid available, microneedles should be mechanically strong. However, some polymers used to fabricate microneedles yield insufficient strength for the ...

    Authors: Gwenaël Bonfante, Hakjae Lee, Leilei Bao, Jongho Park, Nobuyuki Takama and Beomjoon Kim

    Citation: Micro and Nano Systems Letters 2020 8:13

    Content type: Letter

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  3. In this study, the spring constant of an accelerometer with a liquid-type proof mass was analyzed. Unlike a general solid-type microelectromechanical system accelerometer, the Laplace pressure is considered a ...

    Authors: Dong-Joon Won, Sangmin Lee and Joonwon Kim

    Citation: Micro and Nano Systems Letters 2020 8:12

    Content type: Letter

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  6. Conventional 3D printing methods require the addition of a supporting layer in order to accurately and reliably fabricate the desired final product. However, the use of supporting material is not economically ...

    Authors: Jongkyeong Lim, Sangmin Lee and Joonwon Kim

    Citation: Micro and Nano Systems Letters 2020 8:9

    Content type: Letter

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  7. Vanadium sulfide (VS2) nanomaterials have been deposited on surface-modified stainless steel mesh (SMSSM) by facial hydrothermal method and subsequent effects of acidic etching on surface morphology and supercapa...

    Authors: Swati J. Patil, Rahul B. Pujari, Tianfeng Hou, Jongsung Park and Dong-Weon Lee

    Citation: Micro and Nano Systems Letters 2020 8:8

    Content type: Letter

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  10. This paper presents a computer-controlled multidirectional UV-LED lithography system for 3-D microfabrication. The presented UV-LED system has adopted adjustable or programmable high-intensity UV-LEDs as a lig...

    Authors: Sabera Fahmida Shiba, Jun Ying Tan and Jungkwun Kim

    Citation: Micro and Nano Systems Letters 2020 8:5

    Content type: Letter

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  11. We developed a nano field-effect transistor (nanoFET) sensor for detecting ions in the air. Air ions can be measured using a commercial ion counter; however, it is large and expensive equipment, requires airfl...

    Authors: Hye-Lim Kang, Sumi Yoon, Dong-Ki Hong, Won-Hyo Kim, Woo Kyeong Seong and Kook-Nyung Lee

    Citation: Micro and Nano Systems Letters 2020 8:4

    Content type: Letter

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  12. Unfrotunately, the original version of the article [1] contained an error in Funding section. It has been brought to our attention by the authors that the funding year was inadvertently published as 2019, inst...

    Authors: Venkateswaran Vivekananthan, Woo Joong Kim, Nagamalleswara Rao Alluri, Yuvasree Purusothaman, K. S. Abisegapriyan and Sang-Jae Kim

    Citation: Micro and Nano Systems Letters 2020 8:3

    Content type: Correction

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    The original article was published in Micro and Nano Systems Letters 2019 7:14

  16. Aberrant expression of microRNA (miRNA) in biological cells is crucial evidence for early diagnosis of cancer. Improvements in molecular detection techniques enabled miRNA to be detected in human blood obtaine...

    Authors: Hyungbeen Lee and Soo Hyun Lee

    Citation: Micro and Nano Systems Letters 2019 7:21

    Content type: Letter

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  17. We present a highly elastic and wearable piezoresistive strain sensor based on three-dimensional, micro-porous graphene-coated polydimethylsiloxane (PDMS) sponge suitable for being attached on human skin. The ...

    Authors: Young Jung, Kyungkuk Jung, Byunggeon Park, Jaehyuk Choi, Donghwan Kim, Jinhyoung Park, Jongsoo Ko and Hanchul Cho

    Citation: Micro and Nano Systems Letters 2019 7:20

    Content type: Letter

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  19. The development of a DNA microfluidic device with a high speed, low power, and low reagent volume is very critical for real-time genotyping and diagnosis in point-of-care applications. This paper reports a pol...

    Authors: Dae-Sik Lee, Ok Ran Choi and Yujin Seo

    Citation: Micro and Nano Systems Letters 2019 7:18

    Content type: Letter

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  20. Fiber optic based localized surface plasmon resonance (FO-LSPR) sensor is one of the biosensors that detects specific biomolecules and can detect the onset of disease. In this paper, we propose two methods to ...

    Authors: Se-Woong Bae, Hyeong-Min Kim, Jae-Hyoung Park and Seung-Ki Lee

    Citation: Micro and Nano Systems Letters 2019 7:17

    Content type: Letter

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  21. In the present study, we proposed a fabrication process of anisotropic wetting surfaces with asymmetric grooved parallelogram structures employing basic MEMS processes and micro transfer molding process. A Si ...

    Authors: Ye-Eun Lee, Dong-Ki Lee and Young Hak Cho

    Citation: Micro and Nano Systems Letters 2019 7:16

    Content type: Letter

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  22. We present the selective laser-induced etching (SLE) process and design guidelines for the fabrication of three-dimensional (3D) microfluidic channels in a glass. The SLE process consisting of laser direct pat...

    Authors: Sungil Kim, Jeongtae Kim, Yeun-Ho Joung, Sanghoon Ahn, Jiyeon Choi and Chiwan Koo

    Citation: Micro and Nano Systems Letters 2019 7:15

    Content type: Letter

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  23. The present work describes the hybridization of two different energy harvesters works simultaneously in a single package. By applying simultaneous mechanical force, two components such as triboelectric nanogen...

    Authors: Venkateswaran Vivekananthan, Woo Joong Kim, Nagamalleswara Rao Alluri, Yuvasree Purusothaman, K. S. Abisegapriyan and Sang-Jae Kim

    Citation: Micro and Nano Systems Letters 2019 7:14

    Content type: Letter

    Published on:

    The Correction to this article has been published in Micro and Nano Systems Letters 2020 8:3

  24. Blood vessels in central nervous system act as a great hurdle for drug delivery to the human brain. They only allow passage of water, some gases, lipid molecules, glucose and amino acid by selective transporte...

    Authors: Bohye Chung, Jaehoon Kim, Hui-Wen Liu, Jiyoung Nam, Hyunho Kim, Hyun Jeong Oh, Yong Ho Kim and Seok Chung

    Citation: Micro and Nano Systems Letters 2019 7:13

    Content type: Letter

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  25. Herein, we present a facile fabrication method to prepare the optically transparent, flexible and self-cleanable poly(urethane acrylate) (PUA) superhydrophobic film. The low surface energy siloxane functionali...

    Authors: Tian-Feng Hou, Arunkumar Shanmugasundaram, Bui Quoc Huy Nguyen and Dong-Weon Lee

    Citation: Micro and Nano Systems Letters 2019 7:12

    Content type: Letter

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  26. We have rationally designed and developed a fully automated desktop furnace system that enables programmable chemical vapour deposition growth of carbon nanotubes with controlled height, density, and pattern a...

    Authors: Ju Hyun Ahn, Minho Na, Sungkwan Koo, Hyunsoo Chun, Inhwan Kim, Jong Won Hur, Jae Hyuk Lee and Jong G. Ok

    Citation: Micro and Nano Systems Letters 2019 7:11

    Content type: Letter

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  29. Implementing 3D surface imaging camera systems into miniaturized devices for a variety of 3D applications such as movement recognition, object sensing, and 3D endoscopy has received great attention over the pa...

    Authors: Sung-Pyo Yang, Yeong-Hyeon Seo, Jae-Beom Kim, Hyunwoo Kim and Ki-Hun Jeong

    Citation: Micro and Nano Systems Letters 2019 7:8

    Content type: Review

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  31. The influence of the air atmosphere on the electrical conductivity of nanocrystalline thin SiC films obtained by method of direct ion deposition on sapphire was studied. Measurements were performed on two seri...

    Authors: Alexander Semenov, Anatolii Kozlovskyi, Stanislav Skorik and Denis Lubov

    Citation: Micro and Nano Systems Letters 2019 7:6

    Content type: Letter

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  32. A polymer-based tactile sensor with flexibility and multi-directional sensing capability is presented. The proposed sensor consists of a polydimethylsiloxane (PDMS) bump, a polyimide (PI) substrate, Cr/Au elec...

    Authors: Soonjae Pyo, Jae-Ik Lee, Min-Ook Kim, Hyung-Kew Lee and Jongbaeg Kim

    Citation: Micro and Nano Systems Letters 2019 7:5

    Content type: Letter

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  33. This work presents a flexible cable-shaped supercapacitor based on carbon fibers (CFs) coated with graphene flakes (GFs) for wearable electronic applications. The CF bundles were adopted as base materials and ...

    Authors: Jiyoung Kim, Junli Yin, Xing Xuan and Jae Yeong Park

    Citation: Micro and Nano Systems Letters 2019 7:4

    Content type: Letter

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  34. This paper presents a light detection and ranging (LIDAR) system using electromagnetically actuated two-axis scanning micromirror. The distance measurement with the LIDAR is based on the indirect time-of-fligh...

    Authors: Seung-Han Chung, Sung-Woo Lee, Seung-Ki Lee and Jae-Hyoung Park

    Citation: Micro and Nano Systems Letters 2019 7:3

    Content type: Letter

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  35. This study proposes the unique method to analyze the cleanliness of the fine metal mask (FMM) used in OLED display manufacturing after FMM cleaning process. We developed a FMM-mimic microstructure as a substit...

    Authors: Yong-Cheol Jeong, Jun-Ho Yu, Kwon-Yong Shin, Sol Lee, Chang-Ro Yoon and Sang-Ho Lee

    Citation: Micro and Nano Systems Letters 2019 7:2

    Content type: Letter

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  39. Here, we develop a flexible microrobot enhancing the steerability of a conventional guidewire. To improve steerability, a microrobot is attached to the tip of the guidewire and guided using an external magneti...

    Authors: Sungwoong Jeon, Ali Kafash Hoshiar, Sangwon Kim, Seungmin Lee, Eunhee Kim, Sunkey Lee, Kangho Kim, Jeonghun Lee, Jin-young Kim and Hongsoo Choi

    Citation: Micro and Nano Systems Letters 2018 6:15

    Content type: Letter

    Published on:

  41. In this paper, a stress and fracture study, occurring during the chemical mechanical polishing (CMP) of anodically bonded substrates is presented. The samples contain glass pillars, used to form the glass cavi...

    Authors: Sung-min Sim, Yeonsu Lee, Hye-Lim Kang, Youngsuk Hwang, Chi-Hyun Park, Ignacio Llamas-Garro and Jung-Mu Kim

    Citation: Micro and Nano Systems Letters 2018 6:13

    Content type: Letter

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  44. A volatile organic compound (VOC) sensor array based on metal oxide nanoparticles (MOX NPs) functionalized by metalloporphyrins (MPPs) was demonstrated. The VOC sensor array was composed of four single sensors...

    Authors: Byeonghwa Cho, Kyounghoon Lee, Soonjae Pyo and Jongbaeg Kim

    Citation: Micro and Nano Systems Letters 2018 6:10

    Content type: Letter

    Published on:

  46. This paper reports the first demonstration of hydrogel conical tip attachment onto quartz tuning fork (QTF) by using an elastomeric tip mold that is soft-lithographically replicated from an electrochemically e...

    Authors: Juhee Ko, Amun Jarzembski, Keunhan Park and Jungchul Lee

    Citation: Micro and Nano Systems Letters 2018 6:8

    Content type: Letter

    Published on:

  47. A catalytic combustible type single-chip micro gas sensor was fabricated by MEMS technology and responses with input powers and methane and hydrogen gas concentrations were characterized. The ranges of respons...

    Authors: Woongjin Jang, Joon-Shik Park, Ki-Won Lee and Yonghan Roh

    Citation: Micro and Nano Systems Letters 2018 6:7

    Content type: Letter

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  48. This study aims to propose a new fabrication method for an ohmic contact type RF-MEMS switch with Au–Au/carbon nanotube (CNT)-composite contacts. These contacts are proposed to improve the reliability and the ...

    Authors: Tomoaki Kageyama, Koichi Shinozaki, Lan Zhang, Jian Lu, Hideki Takaki and Sang-Seok Lee

    Citation: Micro and Nano Systems Letters 2018 6:6

    Content type: Letter

    Published on:

  49. Thanks to the excellent barrier property and fabrication accessibility, Parylene has been actively used in the microelectromechanical system. An ultra-thin Parylene film with thickness smaller than 100 nm is u...

    Authors: Yaoping Liu, Dongyang Kang, Wangzhi Dai, Haida Li, Wei Wang and Yu-Chong Tai

    Citation: Micro and Nano Systems Letters 2018 6:5

    Content type: Letter

    Published on:

  50. Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabrication of microelectromechanical systems components. In this technique of microfabrication, alignment of mask edg...

    Authors: Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey and Prem Pal

    Citation: Micro and Nano Systems Letters 2018 6:4

    Content type: Letter

    Published on:

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  • ISSN: 2213-9621 (electronic)