Recently, novel biomolecules separation and detection methods based on ion concentration polarization (ICP) phenomena have been extensively researched due to its high amplification ratio and high-speed accumul...
Authors: Seok Young Son, Hyomin Lee and Sung Jae Kim
We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as ...
Authors: Han-Il Jung, Dae-Sung Kwon and Jongbaeg Kim
Controlling cells’ movement is an important technique in biological analysis that is performed within a microfluidic system. Many external forces are utilized for manipulation of cells, including their positio...
Authors: Yugyung Jung, Ji-chul Hyun, Jongchan Choi, Arslan Atajanov and Sung Yang
This paper presents a novel dual-axis accelerometer that consists of a liquid metal droplet in a cone-shaped channel and an electrode layer with four Nichrome electrodes. The sensor uses the advantages of the ...
Authors: Myoung Huh, Dong-Joon Won, Joong Gil Kim and Joonwon Kim
In this paper, we presents a MEMS pressure sensor integrated with a readout circuit on a chip for an on-chip signal processing. The capacitive pressure sensor is formed on a CMOS chip by using a post-CMOS MEMS...
We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co m...
Authors: Kyongtae Kim, Hong-Beom Kwon, Hye-Rin Ahn and Yong-Jun Kim
Construction of three-dimensional (3D) microenvironment become an important issue in recent biological studies due to their biological relevance compared to conventional two-dimensional (2D) microenvironment. ...
Authors: Chang Hyun Cho, Seyong Kwon and Je-Kyun Park
MEMS laser scanning enables the miniaturization of endoscopic catheters for advanced endomicroscopy such as confocal microscopy, multiphoton microscopy, optical coherence tomography, and many other laser scann...
Authors: Kyungmin Hwang, Yeong-Hyeon Seo and Ki-Hun Jeong
In this study, the effects of open area ratio (OAR) variations by micro-patterns on Cu alloy electrodeposition were analyzed experimentally. To change the OAR of the samples, a strip-type micro-pattern was for...
Bacterial therapies have been paid significant attentions by their ability to penetrate deep into the solid tumor tissue and its propensity to naturally accumulate in tumors of living animals. Understanding th...
Authors: Eunpyo Choi, Bohee Maeng, Jae-hun Lee, Hyung-kwan Chang and Jungyul Park
In this paper, nano-silver ink-jet printed transmission lines were fabricated to investigate RF performance on both flame retardant (FR-4) and polyimide (PI) as rigid and flexible substrates. The transmission ...
Authors: Sung-min Sim, Yeonsu Lee, Hye-lim Kang, Kwon-Yong Shin, Sang-Ho Lee and Jung-Mu Kim
This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NOx) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual...
In wet bulk micromachining, the etching characteristics are orientation dependent. As a result, prolonged etching of mask openings of any geometric shape on both Si{100} and Si{110} wafers results in a structu...
Authors: Sajal Sagar Singh, Prem Pal, Ashok Kumar Pandey, Yan Xing and Kazuo Sato
This paper introduces a pneumatically driven inkjet printing system that forms highly viscous microdroplets in the nanoliter volume range. The printing system has a unique printing mechanism that uses a flexib...
A point electron source is desired to improve performance of high brightness electron beam instruments. It is valuable to create nano-sized tungsten (W) tip from sharp ordinary polycrystalline W needle. The sh...
Authors: Shigeki Hayashi, Masashi Ono, Shinya Tomonaga and Haruka Nakanishi
Originally introduced by H. A. Pohl in 1951, dielectrophoretic (DEP) force has been used as a striking tool for biological particle manipulation (or separation) for the last few decades. In particular, dielect...
Authors: Dongkyu Lee, Bohyun Hwang and Byungkyu Kim
The concepts of microrobots has been drawn significant attentions recently since its unprecedented applicability in nanotechnology and biomedical field. Bacteria attached microparticles presented in this work ...
Authors: Keon Huh, Darong Oh, Seok Young Son, Hyung Jung Yoo, Byeonghwa Song, Dong-il Dan Cho, Jong-Mo Seo and Sung Jae Kim
An ingenious combination of plasmonic nanomaterials and one of the most relevant biological systems, deoxyribonucleic acid (DNA) is achieved by bioconjugating gold nanorods (GNRs) with DNA via electrostatic in...
Authors: Luciano De Sio, Giulio Caracciolo, Ferdinanda Annesi, Tiziana Placido, Daniela Pozzi, Roberto Comparelli, Alfredo Pane, Maria Lucia Curri, Angela Agostiano and Roberto Bartolino
In this brief a new low actuation voltage RF MEMS switch is presented which can be integrated and controlled with available CMOS technologies. Despite the advantages in the design of RF MEMS switches designing...
Wet anisotropic etching based silicon micromachining is an important technique to fabricate freestanding (e.g. cantilever) and fixed (e.g. cavity) structures on different orientation silicon wafers for various...
Utilizing nanofluid as an absorber fluid is an effective approach to enhance heat transfer in solar devices. The purpose of this review is to summarize the research done on the nanofluids’ applications in sola...
A low-voltage, low-power method of electrically deforming a liquid-metal droplet via the direct manipulation of its surface tension is presented. By imposing a quasi-planar geometry on the liquid metal, its se...
Authors: Ryan C Gough, Andy M Morishita, Jonathan H Dang, Matthew R Moorefield, Wayne A Shiroma and Aaron T Ohta
This paper describes a novel thread-shaped power generator which can be incorporated into cloth. A carbon-activated cotton thread is utilized for harvesting electrostatic energy from environment using contact ...
Authors: Baek Hyun Kim, Benjamin S Barnhart and Jae W Kwon
Quantum information processing (QIP) has become a hot research topic as evidenced by S. Haroche and D. J. Wineland receiving the Nobel Prize in Physics in 2012. Various MEMS-based microfabrication methods will...
Authors: Dong-Il “Dan” Cho, Seokjun Hong, Minjae Lee and Taehyun Kim
This review gives an overview of the development of surface acoustic wave (SAW) based gyroscopes. Different types of SAW based gyroscope are first presented, which are categorized into standing-wave based or p...
Authors: Haekwan Oh, Ki Jung Lee, Keekeun Lee and Sang Sik Yang
Biophysical properties of living cells such as mechanical and chemical have been proven to play important roles in regulations of various biological activities including disease progression both at the cellula...
Non-wetting super-hydrophobic or super-lyophobic surfaces are of great interest in a variety of applications. Natural water repelling surfaces show micro-/nano- combined hierarchical structure which shows extr...
Authors: Youngsam Yoon, Daeyoung Kim and Jeong-Bong Lee
We firstly demonstrated the detection of anions in air using a nano field-effect transistor (nanoFET) device. Negative ions in air charged the top surface of the silicon nanoFET channel affecting the fieldeffe...
Authors: Yeong-Tai Seo, Kook-Nyung Lee, Kuk Jin Jang, Min-Ho Lee, HyungSu Lee, WooKyeong Seong and Yong-Kweon Kim
We report a fabrication technique for dense, detailed lithographic patterning on high-aspect-ratio vertical sidewalls, and illustrate its use through the fabrication of etched array of micro-dimples on the sid...
Authors: Chang-Hyeon Ji, Florian Herrault and Mark G Allen
The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-in...
This paper introduces a pneumatic dispensing system to control the velocity of nanoliter droplets with small variation of volume. The system consists of a flexible membrane integrated with a backflow stopper. ...
Authors: Sangmin Lee, In Ho Choi, Young Kwon Kim and Joonwon Kim
An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam stru...
Authors: Min-Wu Kim, Yong-Ha Song, Seung-Deok Ko, Sang-Joon Ahn and Jun-Bo Yoon
This paper presents an electrochemical sensing approach that enables quantitative detection of three major catecholamine hormones from a mixture by specifically employing a chemically-modified microelectrode a...
Authors: Jung-Hoon Yang, Hyun Tae Kim and Hanseup Kim
A piezoelectrically actuated corner cube retroreflector (CCR) has been investigated for free space optical communications. The proposed CCR consisted of two mutually orthogonal bulk-micromachined mirror assemb...
Biomimetics is the study and simulation of biological systems for desired functional properties. It involves the transformation of underlying principles discovered in nature into man-made technologies. In this...
We proposed a micro electrode fabrication method by a metal inkjet printing technology for the bio-applications of dielectrophoresis (DEP). The electrodes are composed of bottom planar gold (Au) electrodes and...
Authors: Seung Hyun Lee, Gyu-Young Yun, Yul Koh, Sang-Ho Lee and Yong-Kweon Kim
Zinc oxide (ZnO) nanowires were synthesised through two different methods; the vapour liquid solid (VLS) method and an aqueous solution method. Each method had its own set of parameters and changes in those pa...
Authors: Thomas S van den Heever and Willem J Perold
Wafer level adhesive bonding has been applied for the fabrication of micro systems which have heterogeneous components on LSI. Films or MEMS devices formed on a carrier wafer are transferred on a LSI wafer, wh...
Existing models for thermoelastic damping consider geometric size effects only, the focus of this study is on tuning of thermoelastic damping with mechanical strain, which reduces both relaxation rate and ther...
In this paper, a simple and robust model is presented to explain the main reason behind undercutting at convex corners and no-undercutting at concave corners. The etch rate of the tangent plane at convex corne...
