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Micro and Nano Systems Letters
Fig. 1 | Micro and Nano Systems Letters

Fig. 1

From: Analysis of liquid-type proof mass under oscillating conditions

Fig. 1

Configuration and sensing principle of the device. a The fabrication process of the device. b Configuration of the sensing electrode. c Cross-sectional view of AA′. Schematic diagram showing the relationship of each capacitance value (i.e., Cap.1, Cap.2, and Cap.3). d Capacitance variations according to acceleration in the x-direction

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