Optical MEMS devices for compact 3D surface imaging cameras

Yang, Sung-Pyo; Seo, Yeong-Hyeon; Kim, Jae-Beom; Kim, Hyunwoo; Jeong, Ki-Hun

doi:10.1186/s40486-019-0087-4

Micro and Nano Systems Letters

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Last updated: Fri, 26 Apr 2024 12:05:02 Z

Optical MEMS devices for compact 3D surface imaging cameras

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