Fig. 5From: Optical MEMS devices for compact 3D surface imaging camerasToF based 3D surface imaging systems; a 254 × 64-pixel single photon CMOS sensor with two-axis scanning MEMS mirror and their measured depth image of 3D scene [39]. b Micromachined electro-absorptive optical modulator for ToF based 3D imaging and the depth map of 3D objects acquired using the ToF system [18, 40, 41]Back to article page