Fig. 3
From: Optical MEMS devices for compact 3D surface imaging cameras
![Fig. 3](http://media.springernature.com/full/springer-static/image/art%3A10.1186%2Fs40486-019-0087-4/MediaObjects/40486_2019_87_Fig3_HTML.png)
Structured light pattern generation system by scanning the MEMS mirror for 3D surface imaging; a wide-angle structured light generation with 1D MEMS mirror immersed in liquid and its 3D imaging results with the pattern generation FOV over 90° [31]. b Line array projector consisted of a 1D scanning MEMS mirror and a diffractive microstructure and the estimation of the depth profile of the object by calculating the line deformation [32, 33]. c Variable structured illumination using Lissajous scanning MEMS mirror and optical patterns from the projector module with different GCD and phase [34]