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Micro and Nano Systems Letters
Fig. 3 | Micro and Nano Systems Letters

Fig. 3

From: Optical MEMS devices for compact 3D surface imaging cameras

Fig. 3

Structured light pattern generation system by scanning the MEMS mirror for 3D surface imaging; a wide-angle structured light generation with 1D MEMS mirror immersed in liquid and its 3D imaging results with the pattern generation FOV over 90° [31]. b Line array projector consisted of a 1D scanning MEMS mirror and a diffractive microstructure and the estimation of the depth profile of the object by calculating the line deformation [32, 33]. c Variable structured illumination using Lissajous scanning MEMS mirror and optical patterns from the projector module with different GCD and phase [34]

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