Fig. 2
From: An SU-8-based microprobe with a nanostructured surface enhances neuronal cell attachment and growth
Fabrication of nanostructures on the microprobe surface: a negative photoresist coating on a glass wafer; b Ti and Au deposition using a Cr mask and inductively coupled plasma reactive-ion etching (ICP-RIE) of an Au layer as an electrode; c coating with an SU-8 passivation layer; d deposition of a Cr layer on the SU-8 microprobe; e self-assembly of polystyrene beads (~ 300 nm diameter) and reduction of polystyrene bead diameter using RIE followed by deposition of a 30 nm Cr layer; and f removal of polystyrene beads by sonication in toluene for 1 h, nanoscale etching of the SU-8 surface, and removal of the Cr mask using a Cr etchant