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Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

Hyunok Cho, Jongcheol Park and Jae Yeong Park

Vibration-based energy harvesters have been considered as a promising power solution for wireless sensor nodes due to their sustainability and reliability in harsh environments and because vibration energy has a higher power. This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. Read more



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Aims and scope

Micro and Nano Systems Letters is an international open access journal published by SpringerOpen. The MNSL offers express online publication of short research papers containing the latest advances in micro and nano-scaled devices and systems. It also offers a rapid route for the international dissemination of high quality research findings from both the micro and nano communities. Manuscripts should report new and significant findings that represent recent advances and practical applications of micro and nano systems engineering.

The journal’s specific areas include, but are not limited to:

• Micro & Nano Fabrication Technologies
• Packaging Technologies
• Materials and Device Characterization
• Mechanical Sensors and Systems
• Physical (Optical, Magneto) Devices
• Bio and Chemical Sensors and Systems
• Medical Microsystems
• Micro & Nano Fluidic Components and Systems
• Micro & Nano Actuators
• Energy Harvesting and Power Systems
• Nano-Electro-Mechanical Devices and Systems

Associated Society

Micro and Nano Systems Letters is affiliated with The Society of Micro and Nano Systems.



The Editor-in-Chief of Micro and Nano Systems Letters Prof. Jun-Bo Yoon is now also a series New Content Itemeditor of our Microtechnology and MEMS book series. Learn more about the series here.