Fig. 4

Capacitive pressure sensor and sensor array. a Mechanism of capacitive pressure sensor. b Fabrication process using printing technique. Print the bottom electrode on a PI film, and then print the interdigitated electrode on the opposite side of the film through an alignment process. Finally, attach the top electrode with a dome-structure layer to the capacitive sensor. c Exploded view of capacitive pressure sensor array. d Top electrodes with a dome diameter of 30 μm and a pitch of 60 μm in the dome-structure array