Table 1 Linearity comparison of quasi-static MEMS scanners
From: Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes
Comb type | SVC | AVC | CVC |
|---|---|---|---|
Mechanical angle [deg] | 2.9 | 5.1 | 5.8 |
Linearity [%/deg] | 0.288 | 0.795 | 0.083 |
From: Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes
Comb type | SVC | AVC | CVC |
|---|---|---|---|
Mechanical angle [deg] | 2.9 | 5.1 | 5.8 |
Linearity [%/deg] | 0.288 | 0.795 | 0.083 |