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Table 2 Size range and uniformity of silicon nanoparticle fabrication method

From: Silicon nanoparticles: fabrication, characterization, application and perspectives

Method

 

Size range

Uniformity

Top-down

Etching and grinding

100–400 nm

Low

Laser ablation

Larger than several nm

Low

Laser printing

160–400 nm

High

Bottom-up

Pyrolysis of silane

Larger than 10 nm

Low

Reduction of silicon tetrachlorid

Larger than 10 nm

Low

Reduction of silica particles

Carbothermal reduction

80–200 nm

Low

Magnesiothermic reduction

10–350 nm

Low