Micro and Nano Systems Letters

Table 1 The results of average maximum forces, deflections, and corresponding die strengths for the fabricated dummy die

From: Plasma dicing before grinding process for highly reliable singulation of low-profile and large die sizes in advanced packages

Test dies	Avg. P_max (N)	Avg. δ_max (mm)	Avg. σ (MPa)	S_d (MPa)
BDBG (μm)
100	22.74	0.21	1023.41	274.08
200	64.31	0.11	723.53	96.37
300	100.48	0.07	502.41	50.18
SDBG (μm)
100	7.40	0.07	333.10	191.35
200	26.3	0.07	292.82	69.46
300	60.98	0.06	304.91	104.23
PDBG (μm)
100	35.20	0.29	1584.07	214.49
200	119.49	0.18	1344.32	94.47
300	210.47	0.17	1052.36	128.79

Back to article page