Table 2 Comparison of SOI wafer fabrication methods
From: Fabrication and characterization of silicon-on-insulator wafers
Method | Implanted ion | Bonding | Post processing |
|---|---|---|---|
SIMOX | Oxygen | X | Annealing, ITOX |
Smart cut | Hydrogen, helium | O | Annealing, splitting, polishing |
Eltran | X | O | Splitting, planarization |
BSOI/BESOI | X | O | Thinning, planarization |