Fig. 1From: Fabrication and characterization of silicon-on-insulator wafersa Schematic presentation of SOI wafer structure and its advantages. b Devices primarily fabricated using SOI wafers. (left) Reprinted from [1] with permission from AIP Publishing. (center) Reprinted from [2] (CC BY 4.0). (right) Reprinted from [3] (CC BY 2.0)Back to article page