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Micro and Nano Systems Letters

Table 3 Difference in sensitivity of the capacitive pressure sensor for different pore sizes

From: Designing wearable capacitive pressure sensors with arrangement of porous pyramidal microstructures

Simulation

2 μm [53]

2 μm

4 μm

6 μm

Sensitivity [kPa−1]

14.6

14.5

14.63

14.7

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