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Table 2 Sensitivity assessment of the pressure sensor with bulk and porous pyramid dielectric layers by comparing the results of numerical simulations and experimental measurements

From: Designing wearable capacitive pressure sensors with arrangement of porous pyramidal microstructures

Microstructured dielectric layer

Sensitivity [kPa−1]

References

Bulk pyramid

0.42

Experiment [52]

0.417

Simulation

Bulk pyramid

4.30

Experiment [53]

4.26

Simulation

Porous pyramid

14.6

Experiment [53]

14.5

Simulation