From: Designing wearable capacitive pressure sensors with arrangement of porous pyramidal microstructures
Parameter | Symbol | Unit | Range |
---|---|---|---|
Base length | a | µm | 20–300 |
Height | t | µm | 20–200 |
Interstructural separation | d | µm | 20–300 |
Tip length | b | µm | 0.01–20 |
Dielectric constant | \(\epsilon\) | – | 2–60 |
Modulus of elasticity | E | kPa | 120–3000 |
Dielectric layer porosity | v | – | 0–1 |