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Micro and Nano Systems Letters
Fig. 3 | Micro and Nano Systems Letters

Fig. 3

From: Investigation of LIG-based pressure sensors with various silicon-based elastomeric encapsulation layers

Fig. 3

Piezoresistive test and analysis. Schematic of A the pressure-measurement setup. B Relative resistance change with applied pressure for the pressure sensor. C Schematic of the principle of the LIG-based pressure sensor. D Response time and E recovery time of the pressure sensor with PDMS 20:1 encapsulation under 400 kPa. F Relative resistance change with applied pressure for pressure sensors with a Si-elastomer-based material as encapsulation (PDMS 5:1, 10:1, 20:1, and Ecoflex 1:1; N = 3). G Response time of the pressure sensors with various encapsulations (PDMS 5:1, 10:1, 20:1, and Ecoflex 1:1) under 100, 200, 300, and 400 kPa

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