Fig. 1From: Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structuresThree-dimensional simulation results from the identical hole arrays in literature [7] (\(D=1\) \(\upmu\)m, \(S=0.4\) \(\upmu\)m, and \(\text {AR}=H/D=5\)). a–c Three-dimensional schematics with \(n=2\), 4, and 6, respectively. d–f Cross-sectional phase contours at \(t=500\) s obtained along with center-lines of holes (red-dashed lines in a–c for each n). All scale bars are 2 \(\upmu\)mBack to article page