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Micro and Nano Systems Letters
Fig. 1 | Micro and Nano Systems Letters

Fig. 1

From: CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor

Fig. 1

Schematic illustration of the operation of the MEMS tunable inductor. a Circuit sche-matic of a CMOS VCO integrated with the MEMS tunable inductor. b Conceptual diagram of a VCO integrated with the MEMS tunable inductor operating at four frequency bands. The effective length of the inductor changes with the switching state. c The equivalent circuit model of the MEMS tunable inductor. d Power spectrum according to the switching states of the MEMS tunable inductor

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