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Micro and Nano Systems Letters
Fig. 2 | Micro and Nano Systems Letters

Fig. 2

From: Development of a fully automated desktop chemical vapor deposition system for programmable and controlled carbon nanotube growth

Fig. 2

Photographs of the main hardware and software components comprising the desktop CVD system for controlled CNT growths: a 1″-diameter tube furnace equipped with a serial-communicable temperature control module, b completed MFC box assembly containing four MFC channels (upper part) and their throttle valve controller (lower part), and c screenshot of the front panel of a CVD system-controlling LabVIEW software. The left side shows step-wise setting lines for temperatures, gas flows, and step period times, and the right side displays the real-time traces of such parameters during the process operation

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