Fig. 5From: Linear frequency tuning in an LC-resonant system using a C–V response controllable MEMS varactorFabricated results. a Optical top view including electrical tipping pad below the LC device. b SEM images of the proposed device (upper), magnified view of the actuator beam showing the height of g cap and g tune (lower left), and serially connected suspended spiral inductor (lower right)Back to article page