Figure 34From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching Superimposed squares geometry for corner compensation: (a) schematic; (b) etched profile after time t 1 and (c) etched profile at time t 2 (> t 1 ) when structure transformed to a <100> beam [107]. With permission from IOP, Copyright 2006.Back to article page