Figure 24
Sequentially etched shape for a mesa structure with triangular shape compensating design in surfactant added 25 wt% TMAH [120]. With permission from Elsevier, Copyright 2009.
Figure 24 | Micro and Nano Systems Letters
Sequentially etched shape for a mesa structure with triangular shape compensating design in surfactant added 25 wt% TMAH [120]. With permission from Elsevier, Copyright 2009.