Figure 23
SEM pictures of mesa structures fabricated in (a) 40 wt% KOH and (b) 25 wt% TMAH at 70°C using triangular shape compensating geometry shown in Figure 22 .
Figure 23 | Micro and Nano Systems Letters
SEM pictures of mesa structures fabricated in (a) 40 wt% KOH and (b) 25 wt% TMAH at 70°C using triangular shape compensating geometry shown in Figure 22 .
