Figure 2From: Sidewall lithography of micron-sized features in high-aspect-ratio meso-scale channels using a three-dimensional assembled mask Fabricated 3-D mask; (a) perspective view, (b) side view, (c) 3-D white light interferometry profile of the glass-etched microlens formed on the diffuser plate, (d) 2-D profile along line ab in (c). Back to article page