Skip to main content
Micro and Nano Systems Letters
Figure 2 | Micro and Nano Systems Letters

Figure 2

From: Resonant-frequency tuning of angular vertical comb-driven microscanner

Figure 2

Normalized mechanical and electrostatic moment of the AVC-driven microscanner with respect to the angular displacement. The electrostatic moment (bold black curve) is calculated by FEA, and a unit comb electrode set is used to account for the fringing fields. The mechanical restoring moment of the torsional spring is depicted for the torsional spring with (red line) and without (thin black line) an initial tilt angle.

Back to article page