Figure 3From: A bulk-micromachined corner cube retroreflector with piezoelectric micro-cantilevers SEM pictures and photomicrograph of the fabricated MEMS CCR with two supporting and one actuating PZT cantilevers mounted on a PCB substrate: (a) top view of four MEMS CCRs, (b) side view of vertical mirror assembled on horizontal mirror with PZT cantilever, (c) SU-8 holder to align the vertical mirror, and (d) MEMS CCR on PCB test jig. Back to article page