Skip to main content
Micro and Nano Systems Letters

Table 2 Comparison of optical scanning angle (OSA) for quasi-static MEMS scanners

From: Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes

Comb type

AVC

CVC

Mean ± σ

9.7 ± 0.6

13.5 ± 1.2

Σ [%]

6.2

8.9

Back to article page