Fig. 3From: Quasi-statically actuated MEMS scanner with concentric vertical comb electrodesA (area) and δA/δθ varying with mechanical angle of (a) SVC (staggered vertical comb), (b) AVC (angular vertical comb), and (c) CVC (concentric vertical comb), Dotted line overlapped area (A), Solid line δA/δθBack to article page