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Micro and Nano Systems Letters
Fig. 5 | Micro and Nano Systems Letters

Fig. 5

From: Realization of large-scale sub-10 nm nanogratings using a repetitive wet-chemical oxidation and etching technique

Fig. 5

Various sizes of nanogratings produced by the wet-chemical etching technique. SEM image of top view and cross section of the nanogratings in the initial state, after 5, 10 and 15 cycles; and size distribution as measured by the corresponding SEM images above (Additional file 2), with the standard deviation (σ) and the coefficient of variation (CV) (the standard deviation/the mean)

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