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Micro and Nano Systems Letters
Figure 1 | Micro and Nano Systems Letters

Figure 1

From: Negative ions detection in air using nano field-effect-transistor (nanoFET)

Figure 1

Schematic of nanoFET and fabrication process flow. (a) Cross-section of nanoFET sensor for negative ion detection in air. (b) Fabrication process of nanoFET sensor for negative ion detection in air. In process (iv), photoresist masking layer for contact doping implatation was not shown, but represented by a dotted-line area. The second implantation for channel doping was performed on the entire wafer area without masking layer.

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