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Micro and Nano Systems Letters
Figure 1 | Micro and Nano Systems Letters

Figure 1

From: Ultra-low voltage MEMS switch using a folded hinge structure

Figure 1

Comparison between original and proposed switches. (a) Schematic of the original switch with simple hinges and scanning electron micrograph (SEM) images of the original switch with hinges, bent by material stress. (b) Schematic of the proposed switch with folded hinges and SEM images of the switch with flat folded hinges.

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