Figure 5From: A simple and robust model to explain convex corner undercutting in wet bulk micromachining Schematic representation of surfactant adsorption on silicon atoms of convex corners, which belong to {110} planes, in surfactant-added TMAH solution during etching process. The dense layer of surfactant molecules protect the convex corners from etchant that result in the reduction of undercutting. Back to article page