Figure 4From: A simple and robust model to explain convex corner undercutting in wet bulk micromachining Etching characteristics of pure and surfactant (Triton X-100) added 25 wt% TMAH: (a) Si{100} etch rate at different temperatures; (b) Si{110} etch rate at different temperatures; (c) etched profiles of convex corners; (d) undercutting (U= l /d) at convex corners. (e) Micromachining of alphabets in {100}Si surface using (i) pure TMAH and (ii) TMAH+Triton. Back to article page