Table 1 Design of studied multi-height micropyramids based pressure sensor
No. of different micropyramid sizes | No. of Microstructures (per cm2) | Initial resistance(Ω) | ||
|---|---|---|---|---|
w = 60 μm | w = 36 μm | w = 18 μm | ||
1 | 6161 | – | – | 591 |
2 | 5776 | – | 5776 | 1464 |
3 | 1369 | 5476 | 4107 | 2180 |