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Table 1 Properties of silicon [3, 7]

From: Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures

Properties

Value

\(D_s\)(m\(^2\)/s)

Diffusion coefficient

\(1\times 10^{-12}\)

\(\sigma\)(N/m)

Surface tension

1.36

\(\nu\) (atoms/m\(^2\))

The number of atoms per unit area

\(4.99\times 10^{28}\times \epsilon\)

\(\Omega\) (m\(^3\)/mol)

Atomic volume

\(1.21\times 10^{-5}\)