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Micro and Nano Systems Letters
Fig. 1 | Micro and Nano Systems Letters

Fig. 1

From: Ethanol-sensing properties of cobalt porphyrin-functionalized titanium dioxide nanoparticles as chemiresistive materials that are integrated into a low power microheater

Fig. 1

Fabrication of the sensor platform with the suspended micro-heater. a Deposition of 500 nm-thick silicon nitride (Si3N4) on a 300 nm-thick silicon dioxide (SiO2) substrate through low-pressure chemical vapor deposition (CVD). b Deposition of a 25/250 nm-thick Ti/Pt film and patterning with photolithography and reactive ion etching (RIE) on the Si3N4/SiO2 substrate. c Deposition of a 200 nm-thick SiO2 film via plasma-enhanced CVD and patterning with photolithography and RIE, leading to the formation of a passivation layer for the heating element. d Photolithography and RIE to etch SiO2/Si3N4/SiO2 layers for opening the bare Si layer. e Wet etching of the Si substrate using tetramethylammonium hydroxide to form the suspended structure. f Optical image of the fabricated sensor platform with the micro-heater

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