Fig. 1
An optical image of the sensor platform. Ti/Pt electrodes (sensing and heater electrodes) are formed on the suspended SiO2/Si3N4/SiO2 membrane
Fig. 1 | Micro and Nano Systems Letters
An optical image of the sensor platform. Ti/Pt electrodes (sensing and heater electrodes) are formed on the suspended SiO2/Si3N4/SiO2 membrane