Fig. 3From: Two-step hybrid process of movable part inside glass substrate using ultrafast laserFabrication of 3D glass microfluidic devices using a two-step hybrid process and setups for observations of the movable parts. A A two-step hybrid process. B Setup of the valving plug movement test. C Setups of the impeller rotation and the mixing performance. In A, the 3D design was calibrated to reflect the optical properties before laser-direct writingBack to article page