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Micro and Nano Systems Letters
Fig. 2 | Micro and Nano Systems Letters

Fig. 2

From: Two-step hybrid process of movable part inside glass substrate using ultrafast laser

Fig. 2

Schematics of a 3D glass microfluidic valve device and a 3D glass microfluidic impeller device with multi-layer microchannels. A The top, side, and bird views of the valve device. B The cross section of the valve chamber. C The top, side, and bird views of the impeller device. D The cross section of the impeller chamber. The red dashed areas mean the separation layer to fabricate movable parts

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