Fig. 4From: CMOS voltage-controlled oscillator with high-performance MEMS tunable inductorScanning electron microscopy (SEM) images of the fabricated CMOS VCO integrated with the MEMS tunable inductor. a A SEM image of the fabricated inductor with CMOS VCO chip and pads. b A close-in image of the electrostatic RF MEMS switch and signal lines connected to MEMS inductorBack to article page