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Fig. 2 | Micro and Nano Systems Letters

Fig. 2

From: CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor

Fig. 2

Schematic diagrams of the proposed VCO integrated with the MEMS tunable inductor. a Schematic diagram of each component layer of the proposed VCO. b Schematic diagram of the proposed VCO composed of the MEMS tunable inductor with three electrostatically actuated RF MEMS switches, a 3D MEMS inductor, and a CMOS VCO. c Close-in image of the RF MEMS switch with a contact metal and bottom metal layer of the MEMS inductor. d Close-up image of the anchors that connected the MEMS inductor and the CMOS VCO

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