Fig. 3
From: All-soft multiaxial force sensor based on liquid metal for electronic skin
Fabrication process of the proposed sensor. a 3D Printing of microchannel mold. b Placement of the 3D-printed PVA mold on the elastomer film. c Embedment of the mold by spin coating and curing. d Placement of the 2nd mold on the top. e Embedment of the mold. f Removal of the mold. g Filling of liquid metal inside microchannel using syringe injection or vacuum filling. h Fabrication of dome structure using the vacuum chamber. i Curing of additional elastomer for the fixation of dome structure. j Fabrication of the proposed sensor