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Table 1 Values for geometric parameters x–z of sub-structure design III depicted in Fig. 5a and height and linewidth values originating from AFM measurement in Fig. 5b

From: Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications

Geometric Parameters Possible Range of Values
x 109.3–112.8 µm
y 10.1–11.1 µm
z 6.1–8.6 µm
Height 0.6–0.9 µm
Linewidth (FWHM) 3.1–4.5 µm