Table 1 Values for geometric parameters x–z of sub-structure design III depicted in Fig. 5a and height and linewidth values originating from AFM measurement in Fig. 5b
Geometric Parameters | Possible Range of Values |
|---|---|
x | 109.3–112.8 µm |
y | 10.1–11.1 µm |
z | 6.1–8.6 µm |
Height | 0.6–0.9 µm |
Linewidth (FWHM) | 3.1–4.5 µm |