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Micro and Nano Systems Letters
Fig. 5 | Micro and Nano Systems Letters

Fig. 5

From: Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications

Fig. 5

Schematic of sub-structure design III with mirror dimensions and geometric parameters v-z (a), profile of the corresponding structured photoresist layer analyzed by SEM and a close-up of the parallel lines of design III analyzed by AFM (b), SEM image of the resulting micromirrors with entirely planar mirrors (c), close-up SEM image of the mirror plane corner (d), close-up SEM image of the hinge area with the depicted radius of curvature rc (e). Within our structure screening, design III was identified to work best

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