Fig. 3From: Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applicationsA representative 3D sacrificial structure (with sub-structures design III) made of photoresist (a), after deposition of stressed aluminum layer depicted in grey (b), and released micromirror in non-actuated state (c). Insulator and transparent electrode are not shown hereBack to article page