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Table 1 Properties of the materials used for FEM simulation

From: Design and performance evaluation of thin-film actuators based on flexible Ni-Co substrates

Property Ni-Co Platinum Silicon dioxide Silicon nitride
Density (kg/m3) 8913 21,450 2170 2370
Thermal expansion (ppm/K) 17.8 9 0.55 1.4
Young’s modulus (GPa) 320 154 66 166
Poisson’s ratio 0.31 0.39 0.15 0.23
Tensile yield strength (MPa) 1500 120 450 60
Thermal conductivity (W/m·K) 55.35 70 1.3 10
Resistivity (Ω·cm) 1.33\(\times\)10–5 1.04\(\times\)10–5