Table 1 Properties of the materials used for FEM simulation
From: Design and performance evaluation of thin-film actuators based on flexible Ni-Co substrates
Property | Ni-Co | Platinum | Silicon dioxide | Silicon nitride |
|---|---|---|---|---|
Density (kg/m3) | 8913 | 21,450 | 2170 | 2370 |
Thermal expansion (ppm/K) | 17.8 | 9 | 0.55 | 1.4 |
Young’s modulus (GPa) | 320 | 154 | 66 | 166 |
Poisson’s ratio | 0.31 | 0.39 | 0.15 | 0.23 |
Tensile yield strength (MPa) | 1500 | 120 | 450 | 60 |
Thermal conductivity (W/m·K) | 55.35 | 70 | 1.3 | 10 |
Resistivity (Ω·cm) | 1.33\(\times\)10–5 | 1.04\(\times\)10–5 | – | – |