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Micro and Nano Systems Letters
Fig. 4 | Micro and Nano Systems Letters

Fig. 4

From: Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning

Fig. 4

Resonance spectra and pressure dependence. a Amplitude and b phase spectra of a microfluidic resonator with two parallel channels filled with air measured at 0.062 mbar. c Quality factor as a function of the vacuum level. Standard deviations are 2.85, 518.59, and 143.17 for 1013, 0.062, and 6.1 × 10−5 mbar, respectively. d Maximum amplitude at the fundamental resonance as a function of the vacuum level. Standard deviations are 0.22, 9.92, and 15.12 pm, respectively

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